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Customizable target specifications: round target (diameter φ1"-14", thickness 0.5-15 mm),

                                                                   plate target (length < 500 mm * width < 500 mm * height < 25 mm).

                                               Tube target (External diameter φ3.0mm-300mm, Internal diameter φ2.0mm-280mm)

Material purity：>99.995%

Metal impurity content: （Al/Fe/Ca/Mg/Cu/Co/Ni/Ti/Mn/Si/Na/K//P/W/Mo/Zn/Sn）：<10ppm

Flatness（TIR）:<20μm

Local flatness（STIR）:<10μm

Warpage（Warp）:<50μm